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Title磁隧道结的测试系统
Alternative TitleMagnetic tunnel junction test system
Author (Name in English or Pinyin)
Date Issued2021-02-09
Rights Holder香港中文大学(深圳)
Country中国
Degree Type实用新型
Abstract本实用新型涉及一种磁隧道结的测试系统。上述磁隧道结的测试系统包括:溅射装置、遮挡装置、微纳加工装置及测试装置。溅射装置用于轰击靶材以溅射出靶材粒子;遮挡装置用于遮挡部分靶材粒子,以在基材同一侧的不同位置上沉积多个薄膜样品,每个薄膜样品均包括依次层叠的第一磁性薄膜、绝缘薄膜和第二磁性薄膜;微纳加工装置用于对薄膜样品进行加工处理以在每个薄膜样品上形成一个霍尔条;测试装置包括测试电极和测试设备,测试电极与霍尔条接触,且测试电极与测试设备连接,测试设备通过测试电极对薄膜样品的电磁特性进行测试。上述磁隧道结的测试系统兼具成本低且效率高的优点,能够快速高效摸索出最优的工艺参数。
Other AbstractThe utility model relates to a test system of a magnetic tunnel junction. The test system of the magnetic tunnel junction comprises a sputtering device, a shielding device, a micro-nano processing device and a test device. The sputtering device is used for bombarding the target material to sputter out target material particles; the shielding device is used for shielding part of the target materialparticles so as to deposit a plurality of thin film samples at different positions on the same side of the base material, and each thin film sample comprises a first magnetic thin film, an insulatingthin film and a second magnetic thin film which are sequentially stacked; the micro-nano processing device is used for processing the thin film samples to form a Hall strip on each thin film sample; the testing device comprises a testing electrode and testing equipment, the testing electrode is in contact with the Hall strip and connected with the testing equipment, and the testing equipment tests the electromagnetic characteristics of the thin film sample through the testing electrode. The test system of the magnetic tunnel junction has the advantages of low cost and high efficiency, and theoptimal process parameters can be quickly and efficiently found.
Application Date2020-09-08
Patent NumberCN202021950036.3
language中文
Status授权
Application NumberCN202021950036.3
PCT Attributes有效
Open (Notice) NumberCN212514975U
IPC Classification NumberG01R33/12
Patent Agent李睿
Agency广州华进联合专利商标代理有限公司 44224
Data SourceIncoPat
Document TypePatent
Identifierhttps://irepository.cuhk.edu.cn/handle/3EPUXD0A/2630
CollectionInstitute of Robotics and Intelligent Manufacturing
School of Science and Engineering
Recommended Citation
GB/T 7714
赵月雷,周艳. 磁隧道结的测试系统. CN202021950036.3[P]. 2021.
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