Details of Research Outputs

Alternative TitleMagnetic tunnel junction test system
Author (Name in English or Pinyin)
Date Issued2021-02-09
Rights Holder香港中文大学(深圳)
Degree Type实用新型
Other AbstractThe utility model relates to a test system of a magnetic tunnel junction. The test system of the magnetic tunnel junction comprises a sputtering device, a shielding device, a micro-nano processing device and a test device. The sputtering device is used for bombarding the target material to sputter out target material particles; the shielding device is used for shielding part of the target materialparticles so as to deposit a plurality of thin film samples at different positions on the same side of the base material, and each thin film sample comprises a first magnetic thin film, an insulatingthin film and a second magnetic thin film which are sequentially stacked; the micro-nano processing device is used for processing the thin film samples to form a Hall strip on each thin film sample; the testing device comprises a testing electrode and testing equipment, the testing electrode is in contact with the Hall strip and connected with the testing equipment, and the testing equipment tests the electromagnetic characteristics of the thin film sample through the testing electrode. The test system of the magnetic tunnel junction has the advantages of low cost and high efficiency, and theoptimal process parameters can be quickly and efficiently found.
Application Date2020-09-08
Patent NumberCN202021950036.3
Application NumberCN202021950036.3
PCT Attributes有效
Open (Notice) NumberCN212514975U
IPC Classification NumberG01R33/12
Patent Agent李睿
Agency广州华进联合专利商标代理有限公司 44224
Data SourceIncoPat
Document TypePatent
CollectionInstitute of Robotics and Intelligent Manufacturing
School of Science and Engineering
Recommended Citation
GB/T 7714
赵月雷,周艳. 磁隧道结的测试系统. CN202021950036.3[P]. 2021.
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